Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors
نویسندگان
چکیده
Abstract We present a comprehensive study of molybdenum nitride (MoN) thin film deposition using direct current reactive magnetron sputtering. have investigated the effect various conditions on superconducting and electrical properties films. Furthermore, we shown that meander-shaped single-photon detectors made from 5 nm MoN films saturated quantum detection efficiency at telecom wavelength 1550 nm. Our results indicate may be material interest for practical applications low-temperature superconductors, including transition-edge sensors.
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ژورنال
عنوان ژورنال: Superconductor Science and Technology
سال: 2021
ISSN: ['1361-6668', '0953-2048']
DOI: https://doi.org/10.1088/1361-6668/abda5f